Microwave semiconductor device and integrated circuit including

Details Microwave semiconductor device and integrated circuit including Microwave semiconductor device and integrated circuit including

1995-01-26

1996-06-18

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Transmission line lead

257728, 333247, 333248, H01L 2940

Patent

active

055280749

ABSTRACT:
A semiconductor device includes a substrate having a microwave semiconductor element, a microwave transmission line disposed on the substrate and electrically connected to the microwave semiconductor element, and a waveguide terminal structure disposed in the substrate and connected to an end of an external waveguide, wherein an end of a signal conductor of the microwave transmission line is included in the waveguide terminal structure. Input and output of microwave signals between the semiconductor device and an external device are carried out simply by applying an end of the external waveguide to the waveguide terminal structure. As a result, even when the substrate of the semiconductor device warps, an input-output characteristic evaluation of the semiconductor device is carried out with high stability. Further, the microwave signals are transmitted from the external waveguide directly to the microwave transmission line on the substrate or from the microwave transmission line directly to the external waveguide, thereby reducing transmission loss of the microwave signals.

REFERENCES:
patent: 5049978 (1991-09-01), Bates et al.
patent: 5206712 (1993-04-01), Kornrumpf et al.

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