Coating apparatus – Gas or vapor deposition – With treating means
Patent
1989-05-22
1991-08-13
Beck, Shrive
Coating apparatus
Gas or vapor deposition
With treating means
156345, 156643, 31511171, 427 39, 427 451, C23C 1650
Patent
active
050387138
ABSTRACT:
A microwave plasma treating apparatus comprising a vacuum vessel, a device for introducing a microwave to the inside of the vacuum vessel by way of a microwave transmission circuit, a device for supplying a starting gas to the inside of the vacuum vessel, a device for evacuating the inside of the vacuum vessel, and a specimen holder for maintaining a specimen substrate to the inside of the vacuum vessel, wherein a cavity resonator integrated with two matching circuits is disposed in the microwave transmission circuit and a magnetic field generator is disposed to the outside of the cavity resonator, and having the following main features: (a) matching facilitated by a plunger for adjusting the axial length of the cavity resonator and cylindrical sling type irises, E-H tuner or three-stub tuner disposed at the portion of the cylindrical cavity resonator where the microwave is introduced, (b) a bell jar disposed within the cavity resonator to excite TM mode and (c) a magnetic field generator disposed to the outside of the cavity resonator to prepare a region of a great magnetic flux density in the discharging space at the inside of the cavity resonator.
REFERENCES:
patent: 4138306 (1979-02-01), Niwa
patent: 4207452 (1980-06-01), Arai
patent: 4689459 (1987-08-01), Gerling
patent: 4831963 (1989-05-01), Saito et al.
patent: 4866346 (1989-09-01), Gaudreau et al.
Arai Takayoshi
Kanai Masahiro
Kawakami Soichiro
Murakami Tsutomu
Beck Shrive
Canon Kabushiki Kaisha
Owens Terry J.
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