Microwave plasma production apparatus

Details Microwave plasma production apparatus Microwave plasma production apparatus

1989-05-05

1990-03-13

Paschall, M. H.

Electric heating

Metal heating

By arc

21912148, 21912147, 21912136, 219 1055A, 31511121, B23K 900

Patent

active

049084925

ABSTRACT:
A microwave plasma production apparatus according to the present invention is so configured that a cylindrical coaxial wave guide is formed by a cylindrical outer conductor and a helical coil shaped inner conductor, and at least a part of a nonconductive discharge tube is disposed inside said inner conductor, microwave being applied between said outer conductor and said inner conductor.

REFERENCES:
patent: 3980855 (1976-09-01), Boudouris et al.
patent: 4110595 (1978-08-01), Brambilla et al.
patent: 4221948 (1980-09-01), Jean
patent: 4339326 (1982-07-01), Hirose et al.
patent: 4473736 (1984-09-01), Bloyet et al.
patent: 4543465 (1983-09-01), Sakudo et al.

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