Microwave plasma processor

Details Microwave plasma processor Microwave plasma processor

1992-03-27

1993-04-13

Eldred, J. Woodrow

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

20429838, 20415743, 156643, 2191214, B01J 1908

Patent

active

052020959

ABSTRACT:
A microwave plasma processor comprising a vacuum chamber with a gas introduction inlet, an exhaust port, a sample table for loading thereon a sample, a plurality of microwave radiation antennas, and a corresponding plurality of microwave energy introduction inlets thereby enabling a large area substrate to be uniformly plasma-processed at high speed.

REFERENCES:
patent: 4006338 (1977-02-01), Dehn
patent: 4169267 (1974-09-01), Wong et al.
patent: 4581100 (1986-04-01), Hatzakis et al.
patent: 4745337 (1988-05-01), Pichot et al.

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