Electric heating – Metal heating – By arc
Reexamination Certificate
2004-07-09
2009-06-16
Hoang, Tu B (Department: 3742)
Electric heating
Metal heating
By arc
C156S345510, C118S728000, C118S7230MW
Reexamination Certificate
active
07547860
ABSTRACT:
A plasma processing apparatus100used to execute a specific type of processing such as plasma processing on a workpiece by supplying a processing gas into a chamber110while applying high-frequency power to generate plasma includes a stage108on which the workpiece is placed and a stage supporting unit124that holds the stage108. Bellows120and122are disposed above and below the stage supporting unit124to support the stage108in a horizontal state relative to the chamber110. Thus, a plasma processing apparatus that does not allow the workpiece stage to become tilted, affords ease of maintenance and is capable of stable processing is provided. In addition, the internal spaces at the bellows120and122are used as an exhausting pipe to achieve efficient and uniform exhaustion of the chamber110.
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Tanaka Sumi
Yamashita Jun
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Hoang Tu B
Ralis Stephen J
Tokyo Electron Limited
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