Coating apparatus – With indicating – testing – inspecting – or measuring means
Reexamination Certificate
2005-01-04
2005-01-04
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
With indicating, testing, inspecting, or measuring means
C156S345240, C156S345270
Reexamination Certificate
active
06837935
ABSTRACT:
An apparatus forms a diamond film from a microwave plasma by controlling a manufacturing condition based on a spectroscopic measurement of the plasma light emission to obtain a large area of a high-quality diamond film. Using the apparatus, a gas mixture of hydrocarbon gas and hydrogen gas is introduced into a reactor, where the gas mixture is excited by microwave energy which is also introduced into the reactor to generate a plasma, and the light emitted from the plasma is spectroscopically measured using a spectroscope. Furthermore, a formation condition of the diamond film is controlled such that the spectrum of a carbon molecule (C2) falls within a predetermined range of requirement. A carbon molecule vibration temperature is determined from the spectrum, and the formation condition, such as the microwave input power, the reactor pressure, or the gas flow rate, is controlled so that the determined vibration temperature falls within a specified range, especially 2000 to 2800 K.
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Imai Takahiro
Matsuura Takashi
Meguro Kiichi
Fasse W. F.
Fasse W. G.
Hassanzadeh Parviz
Sumitomo Electric Industries Ltd.
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