Microwave ion source

Details Microwave ion source Microwave ion source

1986-12-22

1989-01-10

Moore, David K.

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

31511181, 250423R, 313230, 31323131, 313156, 313161, 3133591, H01J 2700

Patent

active

047975970

ABSTRACT:
A microwave ion source is disclosed and includes a plain rectangular waveguide having a first section to which a microwave generator is coupled, a second section defining a discharge chamber and an intervening transformer section dimensioned to provide for transmission of microwaves between the first section and the second section substantially without impedance losses. The first and second sections have uniform rectangular internal cross-sectional shapes defined by a first dimension which, for both sections equals one half of the wavelength of the microwaves, and a second, smaller dimension which is less than the second section of the waveguide than in the first section.

REFERENCES:
patent: 3364383 (1968-01-01), Cooper
patent: 3495125 (1970-02-01), Koontz
patent: 3593224 (1971-07-01), Eggers et al.
patent: 4041420 (1977-08-01), Riblet
patent: 4058748 (1977-11-01), Sakudo et al.
patent: 4316090 (1982-02-01), Sakudo et al.
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4658143 (1987-04-01), Tokiguchi et al.

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