Microwave ion source

Details Microwave ion source Microwave ion source

1983-02-01

1986-07-01

Chatmon, Saxfield

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250423R, 3133631, 3133611, 315 39, 31511191, H01J 724, H05B 3126

Patent

active

045982317

ABSTRACT:
A microwave ion source comprising a discharge chamber provided with an ion source seed material inlet and an ion outlet, a means for radiating microwaves in said discharge chamber, a means for applying a magnetic filed to the inside of said discharge chamber, a means for supplying ion source seed material to said discharge chamber through said ion source seed material inlet and an ion extraction electrode, said ion extraction electrode being made of magnetic material having a resistivity of less than 10.sup.6 .OMEGA.cm and a permeability of more than 5. The present microwave ion source has an improved ion current efficiency.

REFERENCES:
patent: 3363124 (1968-01-01), Bensussan et al.
patent: 3458743 (1969-07-01), Cleland et al.
patent: 3546513 (1970-12-01), Henning
patent: 3778656 (1973-12-01), Fremiot et al.
patent: 3955118 (1976-05-01), Flemming
patent: 4045677 (1977-08-01), Humphries et al.
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4409520 (1983-10-01), Koike et al.

Affiliated with

Also associated with

Rating

Microwave ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microwave ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microwave ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1084016