Microwave integrated circuit having a passive circuit substrate

Details Microwave integrated circuit having a passive circuit substrate Microwave integrated circuit having a passive circuit substrate

1993-10-01

1994-10-04

Gensler, Paul

Wave transmission lines and networks

Long line elements and components

Strip type

29830, 257691, 257728, 330286, 330307, H01L 2312

Patent

active

053529987

ABSTRACT:
A microwave integrated circuit includes a semiconductor substrate having semiconductor elements, such as transistors, diodes, resistors, and the like, and a passive circuit substrate having passive circuit elements, such as microstrip or coplanar transmission lines, spiral inductors, capacitances, and the like, on its front surface. The passive circuit substrate is mounted on the semiconductor substrate so that the rear surface of the passive circuit substrate faces the surface of the semiconductor substrate on which the semiconductor elements are present, and the semiconductor elements are electrically connected to the elements or grounding conductors of the passive circuit substrate via through-holes or bumps. The passive circuit substrate includes a thin dielectric film having less dielectric loss than the semiconductor substrate, and the passive circuit elements, especially the transmission lines, are disposed on the dielectric substrate. Therefore, the transmission lines have a very small loss in a range from microwave to millimeter-wave frequency bands.

REFERENCES:
patent: 4673958 (1987-06-01), Bayraktaroglu
patent: 4692791 (1987-09-01), Bayraktaroglu
patent: 5049978 (1991-09-01), Bates et al.

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