Wave transmission lines and networks – Plural channel systems – Having branched circuits
Patent
1991-05-17
1993-02-09
Dzierzynski, Paul M.
Wave transmission lines and networks
Plural channel systems
Having branched circuits
333191, 310320, 310324, H03H 970, H03H 9205, H03H 956
Patent
active
051855895
ABSTRACT:
A film bulk acoustic resonator (FBAR) configured as a coplanar transmission line structure. A film resonator formed over an opening in a substrate is connected to associated circuitry by one or more transmission lines formed on the substrate. The coplanar ground plane of this structure provides a simple mechanism for providing a true ground connection to the resonator without the need for vias passing through the substrate. The transmission line connection eliminates the need for wirebonds, thus simplifying fabrication, allowing the device to be more easily modified for computer simulation, and facilitating the operation of the device at microwave frequencies. Embodiments for standard, stacked, and 3-port FBAR's as well as a filter bank consisting of a plurality of coplanar 3-port FBAR's, are described.
REFERENCES:
SBAR Filter Monolithically Integrated with HBT Amplifier, D. Cushman, K. F. Lau, E. M. Garber, K. A. Mai, A. K. Oki, K. W. Kobayashi, Dec. 1990 IEEE Ultrasonics Symposium.
Film Bulk Acoustic Resonator Technology, S. V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Vale, R. A. Moore, Dec. 1990 IEEE Ultrasonics Symposium.
Horwitz Stuart S.
Krishnaswamy S. Visvanathan
Moore Robert A.
Dzierzynski Paul M.
Lee Benny T.
Maire David G.
Westinghouse Electric Corp.
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