Electric heating – Metal heating – By arc
Patent
1989-06-27
1992-11-10
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912144, 156646, 156345, 20429837, H05B 102
Patent
active
051626330
ABSTRACT:
The present invention relates to a plasma treatment apparatus for making plasma surface processing of a specimen such as thin-film formation, etching, sputtering or plasma oxidation by use of plasma produced through microwave discharge. In a specimen chamber provided with a specimen table for holding at least one specimen thereon, a microwave is introduced from a direction intersecting a magnetic line of force so as to propagate in the longitudinal direction of an ECR region or in a direction along the plane of the ECR region. Since the microwave is introduced from the transverse direction of the specimen chamber, the provision of a microwave introducing window at an upper portion of the specimen chamber is not required and hence a counter electrode for applying an electric field to the specimen can be disposed at the upper portion of the specimen chamber, thereby making it possible to apply a uniform electric field to the specimen so that the specimen is subjected to a uniform treatment.
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Fukuda Takuya
Ohue Michio
Sonobe Tadasi
Suzuki Kazuo
Hitachi , Ltd.
Hitachi Engineering and Services Co., Ltd.
Paschall Mark H.
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