Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1997-11-07
2000-03-28
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134902, 134 1, B08B 300
Patent
active
060417994
ABSTRACT:
A microwave-excitation cleaning and rinsing apparatus includes a cell having an inlet for supplying pure water or cleaning chemical solution to the cell and an outlet for exhausting the pure water or cleaning chemical solution from the cell, and a microwave oscillator for generating microwaves and irradiating the pure water or cleaning chemical solution within the cell with the microwaves.
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Lee Paul J.
NEC Corporation
Stinson Frankie L.
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