Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-09-26
1991-05-07
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 451, 427 47, 427249, 4272552, B05D 512, C23C 1626, C23C 1650
Patent
active
050135791
ABSTRACT:
A cyclotron resonance chemical vapor deposition method for coating mechanical component parts, in which the method is particularly advantageous in coating for parts having substantially flat surfaces and corners which are subject to wear. The method includes disposing the parts in a reaction chamber, inputting a reactive gas into the reaction chamber and exciting the reactive gas in the reaction chamber by applying microwave electromagnetic energy in the presence of a magnetic field. A layer is deposited on the corners and flat surfaces of the parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners, thus providing more wear resistance at the corners.
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Bueker Margaret
Morgenstern Norman
Semiconductor Energy Laboratory Co,. Ltd.
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