Microwave energized deposition process with substrate temperatur

Fishing – trapping – and vermin destroying

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437101, 136258, 136261, H01L 2100, H01L 2102, H01L 21326

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active

053468538

ABSTRACT:
Substrate temperatures are maintained above 400.degree. C. During the microwave energized glow discharge deposition of Group IV semiconductor materials. The substrate temperature range provides for the preparation of materials having improved electrical properties. Cell efficiency of a photovoltaic device of the p-i-n type is significantly improved by depositing the intrinsic layer using a microwave generated plasma and a substrate temperature in excess of 400.degree. C. Maximum cell efficiency occurs for depositions carried out in the range of 400.degree.-500.degree. C.

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