Microwave discharge type ion source for ion injection devices

Details Microwave discharge type ion source for ion injection devices Microwave discharge type ion source for ion injection devices

1985-10-28

1987-10-27

Anderson, Bruce C.

Radiant energy

Ion generation

With sample vaporizing means

250423R, 2504922, 3133631, H01J 2700

Patent

active

047031808

ABSTRACT:
A microwave discharge type ion source incorporating a plurality of vaporizing furnaces for vaporizing and ionizing solid or liquid specimens and suited for use in an ion implantation apparatus. The plurality of vaporizing furnaces are charged with a number of same type specimens or different types of specimens for allowing ionization of a same or different specimens in a continuous manner without interruption for supplementation or exchange of the specimens, the furnaces being then vacuumized. A corresponding number of feeding passages are provided for introducing exchangeably and selectively the vapors produced in the furnaces to the ionization chamber. Exchange of the vapors introduced to the ionization chamber is realized by correspondingly changing over electric heaters provided in association with the vaporizing furnaces, respectively. The microwave discharge type ion source exhibits significantly improved operation efficiency as well as much extended continuous operation because time consumption involved in supplementation or exchange of specimens and accompanying vacuumization is significantly reduced.

REFERENCES:
patent: 2756341 (1956-07-01), White
patent: 3434894 (1969-03-01), Gale
patent: 3547074 (1970-12-01), Hirschfeld
patent: 4151420 (1979-04-01), Keller

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