Microwave discharge ion source

Details Microwave discharge ion source Microwave discharge ion source

1981-03-24

1983-10-11

Chatmon, Jr., Saxfield

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

250423R, 3133631, 313364, 31511141, 31511181, H01J 746, H01J 1980

Patent

active

044095201

ABSTRACT:
A microwave discharge ion source according to this invention comprises a microwave generator, a discharge chamber having ridged electrodes, and a waveguide connecting the microwave generator with the discharge chamber. This waveguide consists of a waveguide having no ridged electrode, and a waveguide having ridged electrodes. Further, a vacuum-sealing dielectric plate is disposed at an intermediate position or an end part of the waveguide having no ridged electrode. A space in the waveguide as extends from the vacuum-sealing dielectric plate to the discharge chamber is filled with a dielectric.
As a result, the design and fabrication of the vacuum-sealing dielectric plate are facilitated, and a microwave discharge ion source of high performance is provided.

REFERENCES:
patent: 2698421 (1954-12-01), Kline et al.
patent: 2886742 (1959-05-01), Hull
patent: 3518691 (1970-06-01), Hallendroff
patent: 3778656 (1973-12-01), Fremiot et al.
patent: 4214187 (1980-07-01), Mourier
patent: 4316090 (1982-02-01), Sakudo et al.

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