Microwave applicator, plasma processing apparatus having...

Electric heating – Metal heating – By arc

Reexamination Certificate

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C219S121400, C219S691000, C118S7230MW, C204S298380, C156S345410

Reexamination Certificate

active

06870123

ABSTRACT:
In order to more accurately control the radiation characteristics of microwaves to improve the controllability of processing in radial and circumferential directions of an article, there are disclosed a microwave applicator and a plasma processing apparatus using the applicator, which comprise a circular waveguide having a surface provided with a plurality of slots for radiating microwaves, wherein the centers of the plurality of slots are offset in a direction parallel to the surface with respect to the center of the circular waveguide.

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