Microvalve for fluid delivery system

Details Microvalve for fluid delivery system Microvalve for fluid delivery system

1994-07-18

1996-09-10

Lee, Kevin

Fluid handling

Processes

251 636, 251282, F16K 31126, F16K 31122

Patent

active

055536352

ABSTRACT:
A fluid delivery force-actuated valve, such as a gas delivery pneumatic-actuated valve suitable for use in the electronic industry, employing bellows means so that the actuation means can be used to open or close the valve independent of the force of the pressurized fluid. A method for delivering the pressurized fluid, such as gas, is also disclosed.

REFERENCES:
patent: 4309022 (1982-01-01), Reinicke et al.
patent: 4431159 (1984-02-01), Stubbs
patent: 4526341 (1985-07-01), Thomas
patent: 4634099 (1987-06-01), Danko et al.
patent: 4687017 (1987-08-01), Danko et al.
patent: 4712576 (1987-12-01), Aruzumi et al.
patent: 4763690 (1988-08-01), Martin
patent: 4995589 (1991-02-01), Adishian et al.

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