Microvalve

Details Microvalve Microvalve

1991-10-29

1992-11-10

Rosenthal, Arnold

Valves and valve actuation

Heat or buoyancy motor actuated

25112906, 25112901, 251331, 25112907, F16K 3102

Patent

active

051617749

DESCRIPTION:

BRIEF SUMMARY
BACKGROUND OF THE INVENTION

The invention relates to a microvalve. More particularly it relates to a microvalve which has pressurized-medium connections and a valve seat inserted between them with which a closure member is associated and is deflectable by electrical actuating means.
GB 2,155,152 A has already disclosed such a microvalve which is produced in the multilayer structure known from semiconductor technology. This micromechanical valve has essentially three layers, of which an inlet and an outlet, and also a valve seat are constructed in a silicon base layer and an intermediate layer adjoins said base layer and also an outer covering layer adjoins the latter. The layers form a space producing the pressurised-medium link between the two connections. In this microvalve, the covering layer is at the same time constructed as a membrane into which a closure member belonging to the valve seat is integrated. When this microvalve is operated, an electrostatic actuating device disposed on the membrane has to overcome not only the forces of the resilient membrane but also the fluid pressure present in the inlet since the membrane which closes the valve seat is not compensated with respect to this pressure. The result of this is that the microvalve is suitable only for relatively low pressures and consequently produces a relatively low hydraulic switching power. The dynamic behaviour of the micromechanical valve is consequently also adversely affected. The non-pressure-compensated construction of the microvalve results, in addition, in relatively large actuating forces and consequently in relatively expensive actuating devices.
Reference is furthermore made to the publications EP 0,250,948 A2 and EP 0,261,972 A2 in which the technology of producing such microvalves is described more precisely and it is explained how three-dimensional shapes can be machined in multilayer structures so that different mechanical elements are possible as a result of combining different structural details. The microvalve can consequently be constructed as a 2- or 3-way valve. The membrane can also be disposed in an intermediate layer.


SUMMARY OF THE INVENTION

Accordingly, it is an object of the present invention to provide a microvalve which avoids the disadvantages of the prior art and is a further improvement.
In keeping with these objects and with others which will become apparent hereinafter, one feature of the present invention resides, briefly stated, in a microvalve of the above mentioned type in which a pressure-compensating area acting opposition to a pressure-loaded membrane is disposed in a spa at a closure member firmly joined to the membrane.
When the microvalve is designed in accordance with the present invention it has the advantage that it makes possible a statically pressure-compensated construction of the microvalve in a relatively simple and inexpensive way. As a result of this pressure-compensated construction, higher pressures can be controlled or lower actuating forces can be employed. The fluidic power of the microvalve consequently increases appreciably, it also being possible to achieve high dynamics since only relatively small masses have to be moved. This pressure-compensated construction is suitable, in particular, for production with micromechanical technologies so that, in addition to low unit costs, a high-precision manufacture and reproducibility of the parts is possible even with small dimensions. The construction of the microvalve can be ideally tailored to the possibilities of the different micromechanical manufacturing technologies. Furthermore, such microvalves can be interconnected as desired and can also be combined to form so-called valve series.
The pressure loaded area of the membrane and the pressure-compensating area can be essentially equally large. The size of the pressure-compensating area can be limited by the valve seat. The diameter of the valve seat can correspond approximately to the effective diameter of the membrane. These features make various directions of movement of th

REFERENCES:
patent: 4826121 (1989-05-01), Mikkor

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