Microvalve

Details Microvalve Microvalve

1990-05-23

1991-10-08

Rosenthal, Arnold

Fluid handling

Systems

Multi-way valve unit

25112901, 25112905, 13762528, F16K 3102, F16K 1165

Patent

active

050545221

ABSTRACT:
A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).

REFERENCES:
patent: 2601231 (1952-06-01), Smith et al.
patent: 4530317 (1985-07-01), Schutten
patent: 4781220 (1988-11-01), Smith

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