Microsystem, more particularly microgyrometer, with...

Details Microsystem, more particularly microgyrometer, with... Microsystem, more particularly microgyrometer, with...

2007-08-09

2009-12-15

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

active

07631558

ABSTRACT:
The microgyrometer is provided in a flat substrate and comprises detection means for detecting the movement of two oscillating masses in a measuring direction perpendicular to an excitation direction. The detection means comprise an excitation frame associated with each oscillating mass and a mobile detection element surrounded by a corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed. Each mobile electrode is disposed between associated fixed electrodes of the first and second sets to form two variable differential capacitors. The fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material extending above the fixed electrodes in a plane substantially parallel to the substrate.

REFERENCES:
patent: 5728936 (1998-03-01), Lutz
patent: 6044707 (2000-04-01), Kato
patent: 6705164 (2004-03-01), Willig et al.
patent: 6752017 (2004-06-01), Willig et al.
patent: 2001/0029784 (2001-10-01), Kurachi et al.
patent: 2006/0156815 (2006-07-01), Chen et al.
patent: WO 01/22094 (2001-03-01), None
patent: WO 2004/042324 (2004-05-01), None
patent: WO 2007/077353 (2007-07-01), None

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