Microsystem comprising a bending beam and process of...

Electrical generator or motor structure – Dynamoelectric – Reciprocating

Reexamination Certificate

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C333S186000, C331S1160FE

Reexamination Certificate

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08030805

ABSTRACT:
A mechanical micro system comprising a flexible bending beam extending along a direction, and at least one magnetic element for creating a magnetic field. The flexible beam includes: a first circuit having a first topology for generating, in response to one current flowing through the first circuit, a force having an effect on the beam at one particular place so as to cause a first vibratory mode; a second circuit having a second topology for generating, in response to one current flowing through the second circuit, a force having an effect on the beam at one particular second position so as to cause a second vibratory mode.

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