Microsystem and method for positioning a second element with...

Details Microsystem and method for positioning a second element with... Microsystem and method for positioning a second element with...

2011-03-15

2011-03-15

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Thermal or pyromagnetic

C310S309000, C310S311000, C310S328000

Reexamination Certificate

active

07906887

ABSTRACT:
A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.

REFERENCES:
patent: 5338997 (1994-08-01), Benecke
patent: 6313562 (2001-11-01), Barnes et al.
patent: 6844657 (2005-01-01), Miller et al.
patent: 7495368 (2009-02-01), Gogoi et al.

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