Microstructured chemical sensor

Details Microstructured chemical sensor Microstructured chemical sensor

2004-07-23

2008-11-18

Dole, Timothy J (Department: 2831)

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

C073S335020

Reexamination Certificate

active

07453254

ABSTRACT:
A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.

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patent: 6551248 (2003-04-01), Miller
patent: 6787047 (2004-09-01), Hahn et al.
patent: 2002/0014415 (2002-02-01), Nakayama et al.
patent: 2002/0084885 (2002-07-01), Wienand et al.

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