Microstructure, microreactor, micro heat exchanger and...

Details Microstructure, microreactor, micro heat exchanger and... Microstructure, microreactor, micro heat exchanger and...

2005-08-18

2009-12-15

Griffin, Walter D (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Bench scale

C422S186220, C422S186220, C422S198000, C422S198000

Reexamination Certificate

active

07632470

ABSTRACT:
A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.

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