Valves and valve actuation – Fluid actuated or retarded – Pilot or servo type motor
Patent
1991-08-08
1993-01-05
Rosenthal, Arnold
Valves and valve actuation
Fluid actuated or retarded
Pilot or servo type motor
251 3002, 251 33, 251 45, 251368, 91 52, F16K 3102, F16K 31365
Patent
active
051763583
ABSTRACT:
A flow control device includes a housing with separate main flow and flow control (servo) passages between an inlet port and an exit port. A control chamber in the housing is in fluid communication with the servo passage. A flexible membrane forms a partition between the main flow passage and the control chamber. The servo passage includes a variable servo orifice upstream of the control chamber and a fixed orifice downstream of the chamber. When the servo valve is open to permit passage of fluid into the control chamber, the resultant pressure on the membrane maintains the main valve closed. The main valve opens in response to closing the servo valve. The fixed orifice has a profile sufficiently small to provide for an acceptable leak or continuous fluid flow through the device when the servo valve is open, and further provides for a soft start when the servo valve is closed to open the main valve. The fixed orifice, servo valve including a servo valve orifice and electrostatically controlled closure tabs, and a microbridge flow sensing device, are advantageously formed on a monolithic semiconductor chip mounted inside the housing.
REFERENCES:
patent: 2164511 (1939-07-01), Furlong
patent: 3414010 (1968-12-01), Sparrow
patent: 4203128 (1980-05-01), Guckel et al.
patent: 4418886 (1983-12-01), Holzer
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4581624 (1986-04-01), O'Connor
patent: 4585209 (1986-04-01), Aine et al.
patent: 4647013 (1987-03-01), Giachino et al.
patent: 4722360 (1988-02-01), Odajima et al.
patent: 4756508 (1988-07-01), Giachino et al.
patent: 4821999 (1989-04-01), Ohtaka
patent: 4826131 (1989-05-01), Mikkor
patent: 4898200 (1990-02-01), Odajima et al.
patent: 4914742 (1990-04-01), Higashi et al.
patent: 4944035 (1990-07-01), Aagardl et al.
1991 International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, "Electrically Activated, Normally-Closed Diaphragm Valves", pp. 1045-1048, 91 CH2817-5/91/0000-1045 .COPYRGT.1991 IEEE, Hal Jerman, IC Sensors.
IEEE, Proc. on Micro Electro-Mechanical Systems, 1990, Feb., pp. 95-98, "Micromachined Silicon Microvalve", Tom Ohnstein et al.
Bonne Ulrich
Ohnstein Thomas R.
Atlass Michael B.
Honeywell Inc.
Niebuhr Frederick W.
Rosenthal Arnold
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