Measuring and testing – Speed – velocity – or acceleration – With rotary gyroscope
Patent
1993-05-04
1995-09-19
Noland, Thomas P.
Measuring and testing
Speed, velocity, or acceleration
With rotary gyroscope
G01P 1514
Patent
active
054507510
ABSTRACT:
A microstructure for a vibratory gyroscope has a ring portion supported in such a fashion to allow substantially undamped, high-Q radial vibration. The ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites around its perimeter for sensing radial displacements thereof. The ring, its support and charge conductive sites are formed within sacrificial molds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.
REFERENCES:
patent: 3113463 (1963-12-01), Holt, Jr.
patent: 3559492 (1971-02-01), Erdley
patent: 4849070 (1989-07-01), Bly et al.
patent: 4851080 (1989-07-01), Howe et al.
Frazier, Allen; High Aspect Ratio Electroplated Microstructure Using a Photosensitive Polyimide Process; Feb. 4-7 1992.
Englemann, Ehrmann, Reichl; Fabrication of High Depth to Width Aspect Ratio Microstructures; Feb. 4-7 1992.
Guckel et al; Deep X-ray and UV Lithographics for Micromechanics; Sep. 1990.
GBuckel et al; Thermo-Magnetic Metal Flexure Actuators; 1992.
Christenson et al; Preliminary Results for a Planar Microdyamometer; 1992.
Furuya et al; Microgrid Fabrication a Flurinated Polyimide by Using Magnetically Controlled Reactive Ion Etching; Feb. 1993.
Menz et al; The LIGA Technique-a Novel Concept for Microstructures and the Combination with SI-Technologies by Injection Molding; Sep. 1991.
Eddy David S.
Putty Michael W.
Cichosz Vincent A.
General Motors Corporation
Noland Thomas P.
Oda Christine K.
LandOfFree
Microstructure for vibratory gyroscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microstructure for vibratory gyroscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microstructure for vibratory gyroscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1821862