Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2007-10-30
2007-10-30
Toatley, Jr., Gregory J. (Department: 2877)
Semiconductor device manufacturing: process
Electron emitter manufacture
C356S301000
Reexamination Certificate
active
11008180
ABSTRACT:
In a microstructure: minute pores are formed at a surface of a substrate in such a manner that the minute pores are dispersedly distributed over the surface, and the gaps between the minute pores are 1 micrometer or smaller; minute metal particles are arranged at the minute pores and have such sizes that the minute metal particles can cause localized plasmon resonance; the minute metal particles have head portions protruding from the surface; and the diameters of the head portions are greater than the diameters of the minute pores. In Raman spectrometry, a specimen material is absorbed by the surface from which the head portions protrude, light is applied to the surface, and a spectrum of scattered light is obtained.
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