Microstructure design for high IR sensitivity

Details Microstructure design for high IR sensitivity Microstructure design for high IR sensitivity

1988-11-07

1994-02-15

Sotomayor, John B.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503381, 2503384, 250342, G01J 520, G01J 522, G01J 502

Patent

active

052869768

ABSTRACT:
A microstructure design for high IR sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.

REFERENCES:
patent: 5021663 (1991-06-01), Hornbeck

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