Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2005-05-11
2008-08-19
Baumeister, Bradley W. (Department: 2891)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C257SE21208
Reexamination Certificate
active
07413912
ABSTRACT:
A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.
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Chen Jyh-Shin
Cheng Huang-Chung
Chiou Bi-Shiou
Kao Jiann-Shium
Kuo Meng-Wei
Anya Igwe U.
Baumeister Bradley W.
Instrument Technology Research Center, National Applied Research
The Webb Law Firm
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