Geometrical instruments – Miscellaneous – Light direction
Reexamination Certificate
2005-07-26
2005-07-26
Fulton, Christopher W. (Department: 2859)
Geometrical instruments
Miscellaneous
Light direction
C033S0010DD, C033S568000, C977S726000
Reexamination Certificate
active
06920696
ABSTRACT:
A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P1and P2arranged into alignment along an expanding/shrinking direction. Both ends of the piezoelectric element P1, facing in the expanding/shrinking direction, are fixed to a base member and a movable member, respectively. The other piezoelectric element P2is fixed to the base member only at one end. A gap L is formed between the piezoelectric element P2and the movable member. Where expanding displacement amounts of the piezoelectric elements P1and P2are a1and a2, respectively, voltage applied to the piezoelectric elements P1and P2is so controlled to satisfy an equation, a1+a2=a≧L. It is possible to position the movable member at a position within a maximum stroke a in the nano-order. The driving units may be arranged in the orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.
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Ebihara Kenzo
Sakaida Yasuhiro
Sawada Kiyoshi
Fanuc LTD
Fulton Christopher W.
Guadalupe Yaritza
Staas & Halsey , LLP
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