Microscopic-measurement apparatus

Details Microscopic-measurement apparatus Microscopic-measurement apparatus

2011-01-11

2011-01-11

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By polarized light examination

With polariscopes

C356S600000, C356S601000, C715S836000, C715S856000, C715S849000

Reexamination Certificate

active

07869039

ABSTRACT:
A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The microscopic-measurement apparatus for acquiring optical information from desired portions of a sample by moving a measuring optical axis on a surface of the sample includes an observation-image display section for displaying a sample surface image as an observation image, in a range of visual field which is observable at a present sample position; an optical-axis display section for displaying areas to be measured and a present position of the measuring optical axis in an overlapped state with the observation image; an area setting section capable of setting measuring areas by expanding, reducing, changing in shape and moving the areas to be measured; and an optical-information acquisition section for measuring one set measuring area or several set measuring areas successively with an instruction of starting measurement.

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