Coating processes – Magnetic base or coating – Magnetic coating
Patent
1999-05-20
2000-07-25
Pianalto, Bernard
Coating processes
Magnetic base or coating
Magnetic coating
118282, 118301, 118500, 118504, 118715, 118718, 118720, 118723EB, 20419234, 216 66, 4272555, 427289, 427585, 427595, B05D 512
Patent
active
06093445&
ABSTRACT:
A mask with a microscopic pin-hole having a circular configuration with a diameter of 1 nm to 10 .mu.m or a rectangular configuration with a side of 1 nm to 10 .mu.m is arranged opposite to a substrate. A magnetic material composing a magnetic microdevice is deposited on the substrate through the pin-hole of the mask to form the magnetic microdevice having fine structure on the substrate. By moving the substrate and mask relative to each other in an X-Y plane parallel with the surface of the substrate in a stepwise manner, a plurality of microelements may be formed on the substrate in a matrix form. By moving the substrate and mask relative to each other during the deposition, an elongated microelement may be formed. The rectangular pin-hole of the mask is formed by stacking grid-meshes for use in an electron microscope such that rectangular openings formed in the gridmeshes are aligned in a diagonal direction. The mask may be formed by a diaphragm for use in a transmission electron microscope. The circular pin-hole may be formed by projecting a focussed ion-beam upon a metal foil.
Pianalto Bernard
Shimane University
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