Microscopic batteries for MEMS systems

Details Microscopic batteries for MEMS systems Microscopic batteries for MEMS systems

2004-11-05

2008-12-23

Alejandro, Raymond (Department: 1795)

Chemistry: electrical current producing apparatus, product, and

Current producing cell, elements, subcombinations and...

C429S007000, C429S162000, C029S623100

Reexamination Certificate

active

07468221

ABSTRACT:
Microscopic batteries, integratable or integrated with and integrated circuit, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed.

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See “Appendix A.”

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