Microscopic batteries for MEMS systems

Details Microscopic batteries for MEMS systems Microscopic batteries for MEMS systems

2007-01-23

2007-01-23

Alejandro, Raymond (Department: 1745)

Chemistry: electrical current producing apparatus, product, and

Current producing cell, elements, subcombinations and...

C429S007000, C429S162000

Reexamination Certificate

active

09930539

ABSTRACT:
Microscopic batteries, integratable or integrated with microelectromechanical systems or other microscopic circuits, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed, among which comprise closed system microscopic batteries for internal storage of electricity using interval reactants only, which comprise microscopic electrodes, electrolyte and reservoir for the electrolyte.

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