Microscope with vacuum objective

Details Microscope with vacuum objective Microscope with vacuum objective

2006-10-30

2009-06-09

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

07544950

ABSTRACT:
A microscope for inspecting a surface in an evacuated volume, including an optical objective assembly which is located in the evacuated volume in proximity to the surface. The assembly is arranged to collect and convey radiation from the surface while focusing the radiation so as to form an image of the surface. The microscope further includes a sensor, located in a space outside the evacuated volume, which is arranged to receive the radiation conveyed from the optical objective assembly so as to generate a signal corresponding to the image.

REFERENCES:
patent: 7095022 (2006-08-01), Nakasuji et al.
patent: 2005/0110987 (2005-05-01), Furman et al.
patent: 2005/0205781 (2005-09-01), Kimba
patent: 2006/0060781 (2006-03-01), Watanabe et al.
patent: 2006/0176580 (2006-08-01), Kirkham
patent: 2006/0219909 (2006-10-01), Hatakeyama et al.
patent: 2007/0040118 (2007-02-01), Cheng et al.

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