Optics: measuring and testing – For size of particles – By particle light scattering
Reexamination Certificate
2006-12-05
2006-12-05
Nguyen, Thong (Department: 2872)
Optics: measuring and testing
For size of particles
By particle light scattering
C356S326000, C359S385000, C359S368000
Reexamination Certificate
active
07145652
ABSTRACT:
A microscope with optical components which are provided in the illumination beam path and/or observation beam path and/or detection beam path for exerting different spectral influences on at least one of the beam paths mentioned above. An arrangement comprising a light source emitting a plurality of wavelengths and at least one spectral sensor detecting the light of this light source after interacting with a component are provided, preferably outside these beam paths. The interaction is carried out by transmission or reflection of the light by the component. The detected values of the spectral sensor are compared to pre-stored values and correlation with pre-stored values is advantageously carried out in a storage. The correlation is carried out together with a position signal of a component changer. The detected values are stored separately and together with a position signal of a component changer when there is no correlation with pre-stored values.
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Liedtke Mirko
Moehler Gunter
Wolleschensky Ralf
Carl Zeiss Jena GmbH
Nguyen Thong
Reed Smith LLP
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