Microscope system having vibration dampening mechanism

Optical: systems and elements – Compound lens system – Microscope

Reexamination Certificate

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Reexamination Certificate

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07903328

ABSTRACT:
A movable part to which a specimen or optical component is fixed is effectively damped in a short period of time at low cost, while saving space and energy and avoiding heat generation, thus allowing high-precision observation of a specimen to be carried out quickly after stopping at a certain position. The invention provides a microscope system including a driving mechanism for driving a movable part to which a specimen or optical component is fixed and stopping the movable part at a certain position; and a vibration damping mechanism for damping vibrations generated when stopping the movable part with the driving mechanism. The vibration damping mechanism includes an inertial member having a prescribed mass and a viscoelastic member sandwiched between the inertial member and the movable part. Dimensions in a plurality of directions of the viscoelastic member are set on the basis of resonance frequencies of vibrations generated in multiple directions when stopping the movable part.

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Extended European Search Report dated Mar. 23, 2009 (5 pages), issued in counterpart European Application Serial No. 08020974.5.

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