Microscope system for the detection of emission distribution and

Details Microscope system for the detection of emission distribution and Microscope system for the detection of emission distribution and

1997-08-29

2000-03-21

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

356328, G01J 318, G01J 336

Patent

active

06040907&

ABSTRACT:
A microscope system for detecting the emission distribution of specimens which emit light at least in a punctiform manner, particularly for failure analysis of integrated circuits, comprises an imaging beam path from the specimen in the direction of an at least one-dimensional receiver distribution, wherein at least one element is provided in the imaging beam path for spectral division of the light which is emitted at least in a punctiform manner.

REFERENCES:
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 5112125 (1992-05-01), Neumann
patent: 5192980 (1993-03-01), Dixon et al.
patent: 5301006 (1994-04-01), Bruce
patent: 5706083 (1998-01-01), Iida et al.
patent: 5767965 (1998-06-01), Zhou et al.

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