Microscope stage assembly and control system

Details Microscope stage assembly and control system Microscope stage assembly and control system

1983-05-24

1986-12-02

Gruber, Felix D.

Boots, shoes, and leggings

2504421, 318640, 350531, 364167, 364183, G06F 1546, G05B 1919

Patent

active

046270094

ABSTRACT:
A computerized stage assembly for a Scanning Electron Microscope including a support frame, a tilt frame pivotally coupled to the support frame, an X carriage engaged with the tilt frame for movement in an X direction, a Y carriage engaged with the X carriage for movement in a Y direction, and a pedestal carried by the Y carriage and capable of rotation around an axis substantially normal to both the X and Y directions. The tilt frame, X and Y carriages, and pedestal are moved by computer controlled step motors. The tilting and rotating of a specimen secured to the pedestal is non-eucentric, i.e. the axis of rotation or tilt is not necessarily through the point of inspection on the specimen. A method is disclosed for automatically returning an inspection point to the viewing field of the microscope after a non-eucentric rotation or tilt.

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Gunn et al.: A Versatile Patient Positioner for Radiation Therapy. IEEE Conference, Transactions Nuclear Science, vol. NS-20, No. 3, Jun. 1973.

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