Microscope stage

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33568, G02B 2126

Patent

active

046889086

ABSTRACT:
There is disclosed a microscope having improved means for determining precisely the position of a specimen in relation to the microscope. The microscope comprises a base, a mounting stage for holding a specimen, a microscope objective for viewing the specimen, mounting means adjustably mounting the mounting stage on the base for altering the position of the specimen relative to the microscope objective, and displacement means coupled with the mounting stage for moving the latter relative to the base. The mounting means comprises a flexure mounting, and a strain gauge provided on the flexure mounting for monitoring the extent of flexure of the mounting when the mounting stage is displaced by the displacement means.

REFERENCES:
patent: 3563186 (1971-02-01), Piper
patent: 3870416 (1975-03-01), Brady et al.
patent: 4336657 (1982-06-01), Iwasaki
patent: 4559717 (1985-12-01), Scire et al.
patent: 4565094 (1986-01-01), Sedgewick
Aronstein et al, "Frictionless X, Y, Z and Theta Micropositioning Table", IBM Tech. Disc. Bull. 5-1973, p. 3889.
Gall et al, "An Electrical Micrometer", Jr. of Scientific Instruments, 11-1945, p. 219.
Rabstejnek, C. V. "Step & Repeat Micropositioning Table", IBM Tech. Disc. Bull. 4-1970, pp. 1958-1959.

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