Microscope probe having an ultra-tall tip

Details Microscope probe having an ultra-tall tip Microscope probe having an ultra-tall tip

2006-12-08

2010-12-28

Berman, Jack I (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

General aspects of spm probes, their manufacture, or their...

Probe manufacture

C850S021000

Reexamination Certificate

active

07861316

ABSTRACT:
A microscope probe including a coaxial tip and a coplanar waveguide (CPW) formed on a silicon substrate is provided. The coaxial tip includes a tip shaft and a tip nib formed from the silicon substrate with the tip nib extending from the tip shaft opposite the silicon substrate. The tip shaft includes a first layer of a first conductive material formed over the silicon substrate, a second layer of an insulating material formed over the first layer, and a third layer of a second conductive material formed over the second layer. The tip nib includes the first layer of the first conductive material formed over the silicon substrate and exposed from the second layer and the third layer of the tip shaft. The CPW includes a center conductor formed from the first layer of the first conductive material and a first and a second outer conductor formed from the second layer of the second conductive material.

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