Microscope for inspecting semiconductor wafer

Details Microscope for inspecting semiconductor wafer Microscope for inspecting semiconductor wafer

2005-05-24

2005-05-24

Nguyen, Thong Q (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

C359S368000, C359S391000, C359S393000

Reexamination Certificate

active

06898007

ABSTRACT:
A microscope for inspecting a semiconductor wafer includes an optical unit including objective lenses and oculars for observing the semiconductor wafer; a display unit for magnifying and displaying an image of the semiconductor wafer observed by the optical unit; a sample piece stage holding the semiconductor wafer; a stage moving unit for moving the semiconductor wafer in an x-axis direction, a y-axis direction or a z-axis direction; a stage rotation unit for rotating the semiconductor wafer in a horizontal direction; a stage tilting unit for tilting the semiconductor wafer; and a controller for controlling operation of the microscope.

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