Microscope for compliance measurement

Measuring and testing – Surface and cutting edge testing – Roughness

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G01B 528

Patent

active

059837128

ABSTRACT:
An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.

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