Optical: systems and elements – Diffusing of incident light
Reexamination Certificate
2007-01-23
2007-01-23
Nguyen, Thong Q (Department: 2872)
Optical: systems and elements
Diffusing of incident light
C359S385000, C359S015000, C359S707000
Reexamination Certificate
active
10875934
ABSTRACT:
A microscope, especially a microscope that is used for inspection in semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for the purpose of illumination, preferably in the UV range. At least one rotating diffusion disk is disposed downstream of the laser so as to homogenize the illumination. Preferably, two rotating diffusion disks of opposite rotational sense are disposed in the illumination beam path either directly or indirectly one behind the other.
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XP-002160840—INSPEC Abstract of “Prbory 1 Tekhnika Eksperimenta” vol. 33, No. 4, “Low-loss diffusing element for suppresion of spurious interference from laser illuminator” A.D. Kudanov et al.
English translation of the Japanese reference No. 10-078668.
Engel Thomas
Harnisch Wolfgang
Scheler Roland
Carl Zeiss Jena GmbH
Nguyen Thong Q
Reed Smith LLP
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