Microscope and sample observation method

Details Microscope and sample observation method Microscope and sample observation method

2007-05-22

2007-05-22

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

C359S380000, C359S383000

Reexamination Certificate

active

10804195

ABSTRACT:
For a semiconductor device S as a sample of an observed object, there are provided an image acquisition part1for carrying out observation of the semiconductor device S, and an optical system2comprising an objective lens20. A solid immersion lens (SIL)3for magnifying an image of the semiconductor device S is arranged movable between an insertion position where the solid immersion lens includes an optical axis from the semiconductor device S to the objective lens20and is in close contact with a surface of the semiconductor device S, and a standby position off the optical axis. Then an image containing reflected light from SIL3is acquired with the SIL3at the insertion position, and the insertion position of SIL3is adjusted by SIL driver30, with reference to the image. This realizes a semiconductor inspection apparatus (microscope) capable of readily performing observation of the sample necessary for an analysis of microstructure of a semiconductor device or the like, and a semiconductor inspection method (sample observation method) therewith.

REFERENCES:
patent: 5004307 (1991-04-01), Kino et al.
patent: 5121256 (1992-06-01), Corle et al.
patent: 5125750 (1992-06-01), Corle et al.
patent: 5208648 (1993-05-01), Batchelder et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5422498 (1995-06-01), Nikawa et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 6002792 (1999-12-01), Oguri et al.
patent: 6226238 (2001-05-01), Kasono
patent: 6441359 (2002-08-01), Cozier et al.
patent: 6475398 (2002-11-01), Kitahata
patent: 6594086 (2003-07-01), Pakdaman et al.
patent: 6600714 (2003-07-01), Ichimura et al.
patent: 6608359 (2003-08-01), Kitahata
patent: 6621275 (2003-09-01), Cotton et al.
patent: 6656029 (2003-12-01), Kitahata
patent: 6687058 (2004-02-01), Ippolito et al.
patent: 6778327 (2004-08-01), Pakdaman et al.
patent: 6828811 (2004-12-01), Hanson et al.
patent: 6831782 (2004-12-01), Patton et al.
patent: 6944112 (2005-09-01), Challener
patent: 6961672 (2005-11-01), Kasapi
patent: 2001/0021145 (2001-09-01), Ichimura et al.
patent: 2003/0202255 (2003-10-01), Pakdaman et al.
patent: 2003/0210057 (2003-11-01), Cotton et al.
patent: 2004/0240051 (2004-12-01), Terada et al.
patent: 2004/0240074 (2004-12-01), Pakdaman et al.
patent: 2005/0002028 (2005-01-01), Kasapi et al.
patent: 2005/0030051 (2005-02-01), Hanson et al.
patent: 2005/0063046 (2005-03-01), Arata et al.
patent: 2005/0094258 (2005-05-01), Tanabe et al.
patent: 2005/0094293 (2005-05-01), Tanabe et al.
patent: 2005/0190436 (2005-09-01), Terada et al.
patent: 2005/0220266 (2005-10-01), Hirsch
patent: 0 977 192 (2000-02-01), None
patent: 5-80247 (1993-04-01), None
patent: 05-157701 (1993-06-01), None
patent: 06-300824 (1994-10-01), None
patent: 7-18806 (1995-03-01), None
patent: 07-190946 (1995-07-01), None
patent: 11-003534 (1999-01-01), None
patent: 2002-121930 (2000-04-01), None
patent: 2001-023230 (2001-01-01), None
patent: 2002-189000 (2002-07-01), None
patent: 2002-236087 (2002-08-01), None
patent: 2003-502705 (2003-01-01), None
patent: WO 2004/083930 (2004-09-01), None
patent: WO 2005-083490 (2005-09-01), None
ISTFA, Nov. 2003, “Conference Proceedings from the 29th International Symposium for Testing and Failure Analysis”, pp. 325-329.
ISTFA 2003, “Photoemission and OBIRCH Analysis with Solid Immersion Lens (SIL)”, pp. 1-20.

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