Microscope and interferometer thereof

Details Microscope and interferometer thereof Microscope and interferometer thereof

2006-12-19

2008-08-19

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000, C250S23700G

Reexamination Certificate

active

07414731

ABSTRACT:
An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser beam from the light source unit and splits the laser beam into a first beam and a second beam. The reference beam unit comprises a frequency shifter, a stopper and a spherical mirror. A center of the frequency shifter is located on a curvature center of the spherical mirror, the first beam traveling from the first splitter to the frequency shifter, the frequency shifter splitting the first beam into a diffraction beam and a zero-order beam, wherein the diffraction beam travels to the spherical mirror, reflected by the spherical mirror toward the frequency shifter, passing the frequency shifter to become a reference beam, and the zero-order beam is stopped by the stopper. The detection unit receives the reference beam from the reference beam unit.

REFERENCES:
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patent: 6919561 (2005-07-01), Lee et al.
patent: 7053390 (2006-05-01), Shiraishi
patent: 2006/0170932 (2006-08-01), Hayashi et al.
patent: 100 35 134 (2002-02-01), None
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