Microresonator of double-ended tuning fork configuration

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310367, H01L 4104

Patent

active

044699794

ABSTRACT:
In a quartz crystal microresonator of the type including first and second stem portions, a pair of integral tines extending between the stem portions, a slot between the tines, the slot having opposed crotches where the tines join the stem portions, and a plurality of electrodes mounted on each of the tines, spaced along the lengths thereof, the electrodes being adapted for receipt of an AC voltage for causing the tines to oscillate, there are disclosed several different electrode configurations to optimize resonator performance when operating in the fundamental and first and second overtone flexure modes. The electrodes change polarity along the length of the tines at points where the second derivative of displacement changes polarity.

REFERENCES:
patent: 3601639 (1971-08-01), Hannon et al.
patent: 4215570 (1980-08-01), Eernisse
patent: 4299122 (1981-11-01), Ueda et al.
patent: 4356425 (1982-10-01), Kagure et al.
patent: 4388548 (1983-06-01), Vangheluwe
patent: 4415827 (1983-11-01), Chuange

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