Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2007-07-17
2007-07-17
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C073S705000
Reexamination Certificate
active
11068587
ABSTRACT:
An optically-powered integrated microstructure pressure sensing system for sensing pressure within a cavity. the pressure sensing system comprises a pressure sensor having an optical resonant structure subject to the pressure within the cavity and having physical properties changing due to changing pressures within the cavity. A substrate supports the optical resonant structure. An input optical pathway evanescently couples light into the optical resonant structure. An output optical pathway collects light from the optical resonance structure. A light source delivers a known light input into the input optical pathway whereby the known light input is evanescently coupled into the optical resonant structure by the input optical pathway and a portion of such light is collected from the optical resonant structure by the output optical pathway. A light detector receives the portion of the light collected from the optical resonant structure, and generates a light signal indicative of such portion of the light collected from the optical resonant structure. A temperature compensation sensor generates a temperature signal indicative of the temperature near the optical resonant structure. A spectrum detection device receives the light signal and temperature signal. The spectrum detection device analyzing the light signal and the temperature signal with a detection algorithm to generating a pressure signal indicative of the pressure within the cavity.
REFERENCES:
patent: 4775214 (1988-10-01), Johnson
patent: 5284061 (1994-02-01), Seeley et al.
patent: 6698294 (2004-03-01), Jacob et al.
Ja Shiou-jyh
Johnson Frederick G.
Salsman Lloyd
Shelton Robert
Strecker Brian
Dunlap Codding & Rogers P.C.
Luu Thanh X.
Nomadics, Inc.
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