Microresonator, band-pass filter, semiconductor device, and...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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Details

Type

Reexamination Certificate

Status

active

Patent number

07489212

Description

ABSTRACT:
A microresonator includes a beam-type resonator element in which a beam that is an oscillating portion of the resonator element has a high-resistance portion or an insulating portion.

REFERENCES:
patent: 7095298 (2006-08-01), Song et al.
patent: 2007/0171001 (2007-07-01), Naniwada et al.
patent: 2004-328076 (2004-11-01), None

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